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Q&E INTERNATIONAL CO., LTD. > SERVICE TEST > AIRFLOW VOLUME AND UNIFORMITY TEST

AIRFLOW VOLUME AND UNIFORMITY TEST

1. Procedure for Airflow Volume and Uniformity Test – Flowhood Method

Purpose

To determine the capability of the cleanroom HVAC system to maintain the airflow volume, uniformity and air change rate of the cleanroom within specified limits, URS.

Instrument

Electronic Micromanometer with Flowhood

Procedure

  1. Verify completion of HVAC system testing, adjusting and balancing (TAB) work prior to performing these tests.
  2. Ensure that HVAC system is running the normal mode of operation and that all doors within the suite are closed. To avoid unexpected changes in airflows, ensure that no other personnel or traffic are moving throughout the area during test except in Operational test condition.
  3. Seat the flow flowhood firmly to the filter frame or diffuser to prevent air leakage and observe the measured reading.
  4. Record the results.
  5. Measure the internal dimensions of each room and calculate the room volume.
  6. Using the total measured supply air volume for each room, calculate the actual room air change rate based on the room volume in comparison with the air flow volume.
  7. For cleanroom with negative room pressure, the airflow volume of the return air grille is measured and used in the computation of the room air change rate.

References  :    ISO 14644-3:2005(E) Cleanrooms and associated controlled environments-Part 3: Test methods

Acceptance Criteria

  1. The total airflow volume for the cleanroom shall be as specified in the contract documents, URS or as agreed to between the Owner / Buyer and Q&E International Co., Ltd.
  2. The air change rate shall be as specified in the contract documents, URS or as agreed to between the Owner / Buyer and Q&E International Co., Ltd.

2. Procedure for Airflow Velocity and Uniformity Test – Filter Face Airflow Velocity Unidirectional

Purpose

To determine the airflow velocity and uniformity of the filter face in unidirectional airflow.

Instrument

Electronic Micro-manometer with velgrid / velocity matrix

Procedure

  1. Verify completion of HVAC system testing, adjusting and balancing (TAB) work prior to performing these tests.
  2. Ensure that HVAC system is running the normal mode of operation and that all doors within the suite are closed. To avoid unexpected changes in airflows, ensure that no other personnel or traffic are moving throughout the area during test.
  3. Every filter is divided into 2 equally sized test grids for 600 mm by 600 mm filter, 4 equally sized grids for 1,200 mm by 600 mm and 8 equally sized grids for 1,200 mm by 1,200 mm filter or divide the net filter face into grids of equal area of not greater than 0.37 m2.
  4. The micro-manometer is set up on the testing fixture, which is designed to suit the above grids; the probe is then positioned at the center of each 600 mm by 600 mm grid and measured at approximately 150 mm to 300 mm from the filter face.
  5. Measure the airflow velocity at each test position. Allow minimum of 5 seconds for each measurement and record the average reading during the period.

References  :    ISO 14644-3:2005(E) Cleanrooms and associated controlled environments-Part 3: Test methods
NEBB Procedure Standards for Certified Testing of Cleanrooms (2009-Third Edition)

Acceptance Criteria

  1. The average airflow velocity for the filter shall be as specified in the contract documents, URS or as agreed to between the Owner / Buyer and Q&E International Co., Ltd.

Computation Method

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